Film formation device and film formation method for forming metal film

A film formation device for forming a metal film, comprising at least:

• a positive electrode;
• a solid electrolyte membrane formed on a surface of the positive electrode, the solid electrolyte membrane being disposed between the positive electrode and a substrate to serve as a negative electrode;
• and
• a power supply unit adapted to apply a voltage across the positive electrode and the substrate, wherein
• a voltage is applied across the positive electrode and the substrate to deposit metal on a surface of the substrate from metal ions contained in the solid electrolyte membrane, so that a metal film made of the metal is formed,
• the positive electrode is made of a porous body that allows a solution containing the metal ions to pass therethrough and supplies the metal ions to the solid electrolyte membrane,
• a surface of the positive electrode that is in contact with the solid electrolyte membrane has a film formation surface with a shape that conforms to a shape of a film formation region of the substrate, and a non-film formation surface other than the film formation surface, and
• metal of the film formation surface is metal with a lower oxygen overvoltage than that of metal of the non-film formation surface.

A film formation device for forming a metal film, comprising at least:

• a positive electrode;
• a solid electrolyte membrane formed on a surface of the positive electrode, the solid electrolyte membrane being disposed between the positive electrode and a substrate to serve as a negative electrode;
• and
• a power supply unit adapted to apply a voltage across the positive electrode and the substrate, wherein
• a voltage is applied across the positive electrode and the substrate to deposit metal on a surface of the substrate from metal ions contained in the solid electrolyte membrane, so that a metal film made of the metal is formed,
• the positive electrode is made of a porous body that allows a solution containing the metal ions to pass therethrough and supplies the metal ions to the solid electrolyte membrane, and
• the solid electrolyte membrane contains hydrogen ions.