Laminate, barrier film and method for manufacturing these

A laminate comprising:

• a polymer base material having a top surface;
• an under coat layer formed on at least a part of the top surface of the polymer base material, having a membranous shape or a film shape and containing an organic polymer;
• an adhesive layer formed to cover a top surface of the under coat layer, containing a functional group having nucleophilicity, wherein at least an element ratio O/C which is a ratio between an oxygen O and an carbon C, or an element ratio N/C which is a ratio between a nitrogen N and a carbon C is higher than that of the under coat layer;
• and
• an atomic layer deposition layer formed using a precursor as a material thereof to cover a top surface of the adhesive layer,
• wherein at least a part of the precursor is coupled to the functional group having nucleophilicity.

A method of manufacturing laminate comprising steps of:

• preparing a base material;
• forming an under coat layer on at least a part of a top surface of the base material, having a membranous shape or a film shape and containing an organic polymer having a functional group;
• surface-treating a part of an exposed surface of the under coat layer and densifying the functional group of the organic polymer;
• supplying a precursor material on the exposed surface such that a precursor that becomes an atomic layer deposition film is coupled to an OH group and a densified functional group of the organic polymer contained in the under coat layer;
• and
• removing, from the precursor material, excess precursor material which is not coupled to the under coat layer and saturating a coupling amount of the precursor which is coupled to the OH group of the organic polymer and the densified functional group of the organic polymer, thereby forming the atomic layer deposition film.

A method of manufacturing laminate comprising steps of:

• preparing a base material;
• forming an under coat layer on at least a part of a top surface of the base material, having a membranous shape or a film shape and containing an organic polymer having a functional group;
• surface-treating at least a part of an exposed surface of the under coat layer, thereby forming an adhesive layer having a functional group having nucleophilicity;
• supplying a precursor material on a top surface of the adhesive layer such that a precursor that becomes an atomic layer deposition film is coupled to the functional group of the under coat layer or the functional group having nucleophilicity of the adhesive layer;
• and
• removing, from the precursor material, excess precursor material which is not coupled to the under coat layer and the adhesive layer and saturating a coupling amount of the precursor which is coupled to the functional group of under coat layer or the functional group having nucleophilicity of the adhesive layer, thereby forming the atomic layer deposition film.