Method for producing thermoelectric layers

A method for producing thermoelectric layers configured for thermoelectric generators by depositing thermoelectric material onto a substrate by sputter deposition, comprising the steps of

• producing a target of thermoelectric material by mixing together at least two powdered starting materials in a particle size of 0.01-5000.00 μm under the input of energy by one of mechanical alloying and plasma alloying, wherein the mechanical alloying includes grinding the powdered starting materials, and the input of energy is achieved through loads delivered by impacts and shocks during the grinding, and
• depositing the thermoelectric material from the target onto the substrate by magnetron sputter deposition, thereby forming the thermoelectric layers configured for thermoelectric generators, where a magnetic field is superimposed on an electric field produced by a target cathode and an anode and only a DC gas discharge between the target cathode and the anode serves as an ion source for the magnetron sputter deposition.