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US 9,957,600 B2Granted
Target age compensation method for performing stable reactive sputtering processes
AssigneeOerlikon Surface Solutions AG, Präffikon
InventorsDenis Kurapov, Siegfried Krassnitzer
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Abstract
A method for performing reactive sputtering processes while maintaining the sputtering characteristic at the target as well as the deposition rate constant, or at least in an acceptable range for the industrial production context, independent of the target age.
Claims17
A method for performing a coating process involving sputtering techniques, comprising:
- sputtering at least one target in an atmosphere comprising at least one reactive gas and maintaining sputtering characteristic values and/or coating rate within predefined target values as constant as possible, wherein a deviation of the sputtering characteristic values and/or of the coating rate values from the target values is maintained within an acceptable deviation range for an industrial production context by adjusting a reactive gas partial pressure preactive_gas depending on a target weight wtarget.
Dependencies are inferred from the claim text.