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US 9,957,456 B2Granted
Carbon layer derived from carbide ceramics and preparation method thereof
AssigneeKSM, Inc.
InventorsDae Soon Lim, Min-gun Jeong, Seo-hyun Yoon
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Abstract
Provided is a carbon layer derived from carbide ceramics, wherein metal or non-metal atoms are extracted selectively from the surface of carbide ceramics to form voids, which, in turn, are filled with carbon synthesized by a carbon compound, thereby providing improved roughness and hardness, as well as to a method for preparing the same.
Claims1
A method for preparing a carbon layer derived from carbide ceramics, comprising the steps of:
- (a) heating Silicon Carbide(SiC), carbide ceramics, sintered at high temperature on electric furnace to form voids by extracting Silicon(Si) from the Silicon Carbide(SiC),
- (b) injecting a liquid-phase chloroform to the electric furnace while being bubbled with argon gas in order to carry out a reaction with the heated Silicon Carbide(SiC) to form a carbon layer while filling with carbon in the voids, and
- (c) after step (b), injecting argon gas and hydrogen gas to the electric furnace to remove residual chlorine compounds,
- wherein the voids are filled with carbon by methane gas decomposed from the liquid-phase chloroform injected at step(b).
1 more element
Dependencies are inferred from the claim text.