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US 9,957,406 B2Granted
Method for smoothing a perfluoro alkoxy alkane film surface
AssigneeTohoku University
InventorsMasamichi Iwaki, Tadahiro Ohmi, Kenji Ohyama, Isao Akutsu
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Abstract
Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.
Claims4
A method for smoothing a film surface, comprising the steps of:
- (1) preparing a component having a film containing perfluoro alkoxy alkane (PFA) represented by formula 1
- in which Rf is a perfluoro alkyl group and m and n are both positive integers, and the PFA has a melting point of 298° to 310° C.;
- (2) exposing the component to an atmosphere with a temperature 30° to 70° C. higher than a melting temperature of said PFA so as to melt at least a free surface area of the film;
- (3) exposing the component to the atmosphere with a temperature 5° to 60° C. lower than the melting temperature of said PFA so as to solidify at least a portion of said free surface area;
- (4) remelting said portion of said free surface area by exposing the component to the atmosphere at a temperature of at least the melting temperature of said PFA to 15° C. above said melting temperature;
- and
- (5) lowering a temperature of the atmosphere to room temperature so as to increase smoothness of the free surface area of the film, wherein
- the PFA film is provided on a NiF2 film.
5 more elements
Dependencies are inferred from the claim text.