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US 9,957,192 B2Granted
Low temperature fluoride glasses and glazes
AssigneeApplied Materials, Inc.
InventorsChengtsin Lee, Jennifer Y. Sun
Life of this patent
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Abstract
An article comprises a body having a coating. The coating comprising a eutectic system having a super-lattice of a first fluoride and a second fluoride. The coating includes a glaze on a surface of the coating, the glaze comprising the eutectic system having the super-lattice of the first fluoride and the second fluoride.
Claims12
A method comprising:
- mixing a first fluoride having a first melting temperature with a second fluoride having a second melting temperature that is lower than the first melting temperature to form a mixture comprising the first fluoride and the second fluoride, wherein the second fluoride is ZrF4;
- melting the first fluoride and the second fluoride by heating the mixture of the first fluoride and the second fluoride to a first temperature above at least the second melting temperature;
- cooling the mixture to form a material comprising a eutectic system having a super-lattice of the first fluoride and the second fluoride, wherein the eutectic system has a third melting temperature that is below the first melting temperature and the second melting temperature;
- grinding the material comprising the eutectic system into a powder;
- forming an article or a coating using the powder;
- and
- heating the article or the coating to a second temperature that is below the first melting temperature, below the second melting temperature and above the third melting temperature to cause at least a portion of the article or the coating to transform into at least one of a glaze or a glass ceramic comprising the eutectic system.
4 more elements
A method comprising:
- mixing a first fluoride having a first melting temperature with a second fluoride having a second melting temperature that is lower than the first melting temperature to form a mixture comprising the first fluoride and the second fluoride;
- forming a molten mixture of the first fluoride and the second fluoride by heating the mixture of the first fluoride and the second fluoride to a first temperature above at least the second melting temperature;
- casting the molten mixture of the first fluoride and the second fluoride in a mold;
- and
- cooling the molten mixture to form an article comprising a eutectic system having a super-lattice of the first fluoride and the second fluoride, wherein the eutectic system has a third melting temperature that is below the first melting temperature and the second melting temperature,
- wherein the first fluoride is selected from a group consisting of CaF2, MgF2 SrF2 ErF3, NdF3 , ScF3 , CeF4 , TiF3, HfF4 and YF3.
3 more elements
Dependencies are inferred from the claim text.