Methods and systems for fast imprinting of nanometer scale features in a workpiece
AssigneeNorth Carolina State University
InventorsThomas A. Dow, Erik Zdanowicz, Alexander Sohn, Ron Scattergood, William John Nowak, Jr.
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Abstract
The subject matter described herein relates to methods and systems for fast imprinting of nanometer scale features in a workpiece. According to one aspect, a system for producing nanometer scale features in a workpiece is disclosed. The system includes a die having a surface with at least one nanometer scale feature located thereon. A first actuator moves the die with respect to the workpiece such that the at least one nanometer scale feature impacts the workpiece and imprints a corresponding at least one nanometer scale feature in the workpiece.
Claims13
A method for producing nanometer scale features in a workpiece, the method comprising:
- providing a die having a surface with at least one nanometer scale feature located thereon;
- using a first actuator, moving the die with respect to the workpiece such that the at least one nanometer scale feature impacts the workpiece and imprints a corresponding at least one nanometer scale feature in the workpiece;
- wherein using the first actuator to move the die comprises using the first actuator to move the die in an elliptical path to reduce smearing of the at least one nanometer scale feature imprinted in the workpiece;
- and
- wherein the first actuator comprises a piezoelectric material and a beam, wherein moving the die comprises exciting the piezoelectric material to move the beam at a frequency that is below a resonant frequency of the beam.
A method for producing nanometer scale features in a workpiece, the method comprising:
- providing a die having a surface with at least one nanometer scale feature located thereon;
- using a first actuator, moving the die with respect to the workpiece such that the at least one nanometer scale feature impacts the workpiece and imprints a corresponding at least one nanometer scale feature in the workpiece;
- and
- wherein the first actuator comprises a piezoelectric material and a beam, wherein moving the die comprises exciting the piezoelectric material to move the beam at a resonant frequency of the beam in two directions.
Dependencies are inferred from the claim text.