Vacuum pump with abatement function

A vacuum pump with abatement function comprising:

• a vacuum pump having a discharge port on which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are directly attached;
• wherein the one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas;
• wherein a common utility facility is configured to supply cooling water and an inert gas to the vacuum pump and the one or more abatement parts.