Method for manufacturing a capacitive transducer

A method for manufacturing a capacitive transducer including a cell having a structure in which a vibrating film including a second electrode disposed across a gap from a first electrode is supported to be able to vibrate, the method comprising the steps of:

• forming an insulating layer on the first electrode;
• forming a sacrificial layer on the insulating layer;
• forming a layer on the sacrificial layer, the layer forming at least part of the vibrating film;
• forming an etching hole to communicate with the sacrificial layer;
• removing the sacrificial layer;
• forming a sealing layer for sealing the etching hole;
• and
• etching at least part of the sealing layer,
• wherein before the step of removing the sacrificial layer, an etching stop layer is formed on the layer forming at least part of the vibrating film;
• and
• in the step of etching at least part of the sealing layer, the at least part of the sealing layer is removed until the etching stop layer is reached.