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US 9,953,799 B2Granted
X-ray apparatus and structure manufacturing method
AssigneesNikon Corporation, Nikon Metrology NV
InventorsFumihiko Hakoda, Satoshi Takahashi, Jim Smith
Life of this patent
Estimating the term…
Abstract
Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.
Claims28
An X-ray apparatus, comprising:
- a target configured to generate an X-ray by collision of electrons or transmission of electrons;
- a filament configured to release the electrons to the target;
- a housing that has the filament therein;
- and
- a first holding member configured to hold a portion of the target on an outer side of the housing, wherein said target is disposed on the outer side of the housing.
2 more elements
An X-ray apparatus, comprising:
- a filament configured to release electrons;
- a target configured to generate an X-ray by collision of electrons or transmission of electrons;
- an electron guiding member configured to guide the electrons from the filament to the target;
- a housing configured to hold the filament, the electron guiding member, and the target;
- and
- a first holding member configured to hold a first portion of the housing,
- wherein a first distance between the first portion of the housing and the target is shorter than a second distance between the first portion of the housing and the filament.
4 more elements
An X-ray apparatus comprising:
- a target configured to generate an X-ray by collision of electrons, and wherein said target has first and second end portions;
- a filament configured to release the electrons to the target;
- a housing that has the filament therein;
- and
- a first holding member that extends parallel to a propagation direction of electrons that have passed through an electron guiding member, and wherein said first holding member is configured to hold the first and second end portions from an outer side of the housing.
2 more elements
Dependencies are inferred from the claim text.