Method for growing silicon carbide crystal
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
Estimating the term…
In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. A metal element M (M is at least one metal element selected from at least one of a first group consisting of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Lu, a second group consisting of Ti, V, Cr, Mn, Fe, Co, Ni and Cu and a third group consisting of Al, Ga, Ge, Sn, Pb and Zn) is added to the Si—C solution and the crucible is heated to elute Si and C, which are derived from a main component SiC of the crucible, from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution. In this way, precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution is suppressed.
A method for growing a crystal of silicon carbide by a solution method using a crucible formed of SiC as a main component, as a container for a Si—C solution, comprising
Dependencies are inferred from the claim text.