Vapor cell and method for making same
AssigneeTexas Instruments Incorporated
InventorsTerrence Edward Dyer, Nathan Luke Brockie
Life of this patent
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Abstract
Vapor cells and methods for making the same are presented, in which a cell cavity is completely filled with aqueous alkali metal azide solution and the solution is dried at a controlled evaporation rate to substantially maintain edge contact pinning at an interface with the cavity sidewall to promote preferential evaporation in the center and outward capillary flow from an unpinned air-fluid interface toward the sidewall to form crystallized alkali metal material at the sidewall while inhibiting drying of dispersed aqueous solution on a transparent cavity bottom to provide substantially unrestricted passage of light through the cavity for atomic clock and other applications.
Claims18
A method for fabricating a vapor cell, comprising:
- forming a cavity including at least one sidewall extending between first and second sides of a substrate;
- bonding a lower window to the second side of the substrate, wherein the lower window forms a cavity bottom;
- filling the cavity with an aqueous solution comprising an alkali metal material;
- drying the aqueous solution at a controlled temperature and humidity such that crystallized alkali metal material forms proximate the at least one sidewall and not substantially on the cavity bottom;
- bonding an upper window to the first side of the substrate, the upper window sealing the cavity;
- and
- exposing the crystallized alkali metal material to UV photolysis to form an alkali metal gas in the sealed cavity.
A method of forming a vapor cell, comprising:
- forming a cavity in a substrate defined by at least one sidewall extending between a first opening in a first side of the substrate and a second opening in a second side of the substrate, wherein the cavity is wider at the first opening than at the second opening, and
- forming a crystallized alkali metal material on at least a portion of the at least one sidewall;
- attaching a first window to the second side of the substrate, the first window forming a transparent cavity bottom substantially free of crystallized alkali metal material;
- attaching a second window to the first side of the substrate, the second window sealing the cavity and form a transparent cavity top;
- and
- creating an alkali metal gas in the sealed cavity from the crystallized alkali metal material.
A method for fabricating a vapor cell, comprising:
- forming a cavity including at least one sidewall extending between first and second sides of a substrate;
- bonding a lower window to the second side of the substrate, the lower window forming a cavity bottom;
- filling the cavity with an aqueous solution comprising an alkali metal material;
- drying the aqueous solution at a controlled temperature and humidity such that a edge contact pinning of the aqueous solution at a pinned fluid interface between the aqueous solution and the at least one sidewall is substantially maintained and preferential evaporation of the aqueous solution occurs proximate a center of the lower window, wherein the drying results in crystallized alkali metal material formed proximate the at least one sidewall and not substantially on the cavity bottom;
- bonding an upper window to the first side of the substrate, the upper window sealing the cavity;
- and
- exposing the crystallized alkali metal material to UV photolysis to form an alkali metal gas in the sealed cavity.
Dependencies are inferred from the claim text.