Method for growing silicon carbide crystal
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
Estimating the term…
In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. The SiC crucible is heated such that, for example, an isothermal line representing a temperature distribution within the crucible draws an inverted convex shape; and Si and C, which are derived from a main component SiC of the crucible, are eluted from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution, thereby suppressing precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution. To the Si—C solution of this state, a SiC seed crystal is moved down from the upper portion of the crucible closer to the Si—C solution and brought into contact with the Si—C solution to grow a SiC single crystal on the SiC seed crystal.
A method for growing a silicon carbide crystal by a solution method using a crucible formed of SiC as a main component, as a container for a Si—C solution, comprising
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