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US 9,938,156 B2Granted
B2F4 manufacturing process
OwnerOleg Byl, Edward E. Jones +2inventors
InventorsOleg Byl, Edward E. Jones, Chiranjeevi Pydi, Joseph D. Sweeney
Life of this patent
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Abstract
A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.
Claims8
A reactor system comprising:
- a reaction zone for contacting BF3 gas with boron-containing solids under temperature and pressure conditions effective to form an intermediate species;
- an opening for allowing an unreacted portion of BF3 gas and the intermediate species to exit the reaction zone into a condensation zone for effecting reaction between the intermediate species and the unreacted portion of the BF3 gas to form a reaction product comprising B2F4 wherein the condensation zone effects reaction between the intermediate species and the unreacted portion of the BF3 gas to form a reaction product comprising B2F4 by cooling the intermediate species and the unreacted portion of the BF3 gas in a cryogenic temperature range and wherein the cryogenic temperature range is controlled by use of a hydraulic lift configured to translate a vessel containing material that can cool at cryogenic temperatures, in a selected one of upward and downward directions, between an uppermost position and a lowermost position;
- a recovery zone for recovering the reaction product and unreacted BF3 gas;
- and
- a recycling zone for recycling the recovered unreacted BF3 gas to the reaction zone, wherein the recycling zone comprises a purification zone effective to reduce impurities in the unreacted BF3 gas.
2 more elements
A reactor system comprising:
- a reaction zone for contacting BF3 gas with boron-containing solids under temperature and pressure conditions effective to form an intermediate species;
- the reaction zone comprises a double-walled quartz jacket;
- an opening for allowing an unreacted portion of BF3 gas and the intermediate species to exit the reaction zone into a condensation zone for effecting reaction between the intermediate species and the unreacted portion of the BF3 gas to form a reaction product comprising B2F4;
- the condensation zone comprises a stainless steel vessel and a seal surrounding the opening, the seal sealingly connecting the reaction zone to the condensation zone, wherein the seal is effective to sealingly connect the reaction zone to the condensation zone under vacuum or super-atmospheric pressures;
- a recovery zone for recovering the reaction product and unreacted BF3 gas;
- and
- a recycling zone for recycling the recovered unreacted BF3 gas to the reaction zone, wherein the recycling zone comprises a purification zone effective to reduce impurities in the unreacted BF3 gas.
4 more elements
An apparatus for production of B2F4, comprising:
- a reactor containing a boron reactant that is reactive with boron trifluoride, BF3, to yield boron fluoride, BF, wherein said reactor is configured to provide process conditions effective for reaction of BF3 and said boron reactant to yield BF as a reaction product, and to discharge BF and unreacted BF3 as a reactor effluent;
- a source of BF3 arranged to supply BF3 to the reactor;
- a condensation zone configured to receive the reactor effluent from the reactor and to provide process conditions effective for condensation of BF and BF3 to yield B2F4;
- and
- a recirculation loop for flowing to the reactor unreacted BF3 recoverable from the condensation, wherein the recirculation loop comprises a purification unit configured to purify recirculated BF3 flowed to the reactor, wherein the purification unit comprises a freeze-pump-thaw purification unit.
2 more elements
Dependencies are inferred from the claim text.