Source housing assembly for controlling ion beam extraction stability and ion beam current

An ion extraction system, comprising:

• a source housing including a set of vacuum pumping apertures formed therein;
• an ion source including an arc chamber disposed within the source housing;
• a vacuum liner disposed within an interior of the source housing, the vacuum liner forming a barrier between the set of vacuum pumping apertures and the ion source;
• an extraction aperture plate mounted directly to an end wall defining a distal end of the source housing, the extraction aperture plate extending over an opening in the source housing defined by the interior of the source housing at the distal end, and the extraction aperture plate having an opening substantially aligned with and further defining an aperture of the arc chamber;
• and
• an extraction aperture liner coupled to the arc chamber, the extraction aperture liner extending along an interior surface of the extraction aperture plate, parallel to the extraction aperture plate.

A method comprising:

• providing a source housing defining a distal end and a proximal end;
• mounting an extraction aperture plate directly to an end wall defining the distal end of the source housing, the extraction aperture plate extending over an opening in the source housing defined by the interior of the source housing at the distal end, and the extraction aperture plate having an opening substantially aligned with and further defining an aperture of the arc chamber;
• providing a vacuum liner within an interior of a source housing, the vacuum liner forming a barrier around a set of vacuum pumping apertures of the source housing;
• and
• coupling an extraction aperture liner to the arc chamber, the extraction aperture liner extending along an interior surface of the extraction aperture plate, parallel to the extraction aperture plate.