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US 9,922,804 B2Granted
Compression member for use in showerhead electrode assembly
AssigneeLam Research Corporation
InventorsDarrell Ehrlich, Daniel Arthur Brown, Ian Kenworthy
Life of this patent
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Abstract
A compression member for use in a showerhead electrode assembly of a capacitively coupled plasma chamber. The member applies a compression force to a portion of a film heater adjacent a power supply boot on an upper surface of a thermal control plate and is located between the thermal control plate and a temperature-controlled top plate. The member is composed of an electrically insulating elastomeric material which can work over a large range of compressions and temperatures.
Claims18
A method of manufacturing a thermal control plate of a showerhead electrode assembly, the method comprising:
- attaching a film heater to the thermal control plate;
- attaching power supply boots to the thermal control plate such that each power supply boot electrically contacts a respective film heater section;
- and
- attaching compression members to the thermal control plate such that each compression member is adjacent a respective power supply boot and contacts a portion of a respective film heater section.
1 more element
Dependencies are inferred from the claim text.