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US 9,919,423 B2Granted
Positioning device
AssigneeEtel S.A.
InventorsHélène Mazerolle, Jean-Marc Vaucher, Marc Kunze, Laurent Heiniger
Life of this patent
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Abstract
A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.
Claims10
A system, comprising:
- a positioning device adapted to position a tool at a setpoint position on a flat substrate in an X-Y plane, the tool adapted to exert a process force in an axial direction of the tool perpendicularly onto the substrate;
- wherein the tool includes a multicomponent force sensor adapted to measure unwanted process-force components in a lateral direction;
- and
- wherein the positioning device is adapted to correct the setpoint position of the tool such that the lateral process-force components are minimized.
1 more element
Dependencies are inferred from the claim text.