Method for controlling shape measuring apparatus
AssigneeMitutoyo Corporation
InventorTakashi Noda
Life of this patent
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Abstract
There is provided a method for controlling a shape measuring apparatus which continues to perform nominal scanning measurement to a workpiece having a slightly large deviation from a design data. A scanning path to move a stylus tip is calculated based on design data of a workpiece. The stylus tip is moved along the scanning path. It is monitored whether a distance between the scanning path and an actual workpiece is excessive. When the distance between the scanning path and the actual workpiece is excessive, a trajectory difference error is generated. When the trajectory difference error is generated, geometric correction is performed to the design data so that the design data approaches to the actual workpiece. Scanning measurement is performed based on the design data after the geometric correction.
Claims6
A method for controlling a shape measuring apparatus including a probe having a stylus tip at a tip, and a moving mechanism which moves the stylus tip scanning a surface of a workpiece, and configured to measure a shape of the workpiece by detecting contact between the stylus tip and the surface of the workpiece, the method comprising:
- calculating a scanning path to move the stylus tip based on design data of the workpiece;
- moving the stylus tip along the scanning path;
- monitoring whether a distance between the scanning path and an actual workpiece is excessive;
- generating a trajectory difference error when the distance between the scanning path and the actual workpiece is excessive;
- performing, when the trajectory difference error is generated, geometric correction to the design data such that the design data approaches to the actual workpiece;
- and
- performing scanning measurement based on the design data after the geometric correction.
Dependencies are inferred from the claim text.