Electronic device using MEMS technology
AssigneeKabushiki Kaisha Toshiba
InventorsAkira Fujimoto, Naofumi Nakamura, Tamio Ikehashi
Life of this patent
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Abstract
According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.
Claims16
An electronic device comprising:
- a base region having a surface;
- an element portion located on the base region, the element portion including a movable portion;
- and
- a protective film covering the element portion and forming a cavity on an inner side of the protective film between the protective film and the element portion,
- wherein the protective film includes:
- a first protective layer,
- a hole extending through the first protective layer in a direction parallel to the surface of the base region, at least one of a shape and a size of the hole being changed in an extending direction of the hole, and
- a second protective layer overlying the first protective layer and covering the hole.
An electronic device comprising:
- a base region;
- an element portion located on the base region, the element portion including a movable portion;
- and
- a protective film overlying the element portion and forming a cavity on an inner side of the protective film facing the element portion,
- wherein the protective film includes a first protective layer and a second protective layer on the first protective layer, a hole extending between the inner surface of the first protective layer and the outer surface of the first protective layer, wherein the second protective layer covers the hole, at least one of a shape and a size of the hole being changed in an extending direction of the hole, and
- wherein an inner surface of the hole comprises, at least in part, the first protective layer.
An electronic device comprising:
- a base region;
- an element portion located on the base region, the element portion including a movable portion;
- a protective film overlying the element portion and forming a cavity on an inner side of the protective film facing the element portion;
- and
- a columnar portion extending between a lower surface and an upper surface of the hole,
- wherein the protective film includes a first protective layer and a second protective layer on the first protective layer, a hole extending between the inner surface of the first protective layer and the outer surface of the first protective layer, wherein the second protective layer covers the hole, and
- wherein an inner surface of the hole comprises, at least in part, the first protective layer.
Dependencies are inferred from the claim text.