Adaptive value capture for process monitoring

A non-transitory computer-readable medium having computer-readable program code embodied therein for causing a computer system to perform a method for analyzing test results using automated test equipment, the method comprising:

• selecting a first subset of tests from a plurality of tests, wherein the selecting of the first subset of tests comprises adaptively changing a selection of the first subset of tests in response to past test results of the plurality of tests and past test result statistical analysis of the past test results by carrying forward past monitored tests to a current lot;
• obtaining test results from the plurality of tests, wherein the plurality of tests are executed using at least one testing apparatus controlled by a test cell controller operable to execute a test program, wherein the test program comprises at least one process control rule, wherein the testing apparatus is communicatively coupled with a prober and a handler, and wherein the prober is operable to come in contact with at least one device under test (DUT) for performing a test;
• performing a first statistical analysis on test results from the first subset of tests;
• initiating at least one process control rule as determined by results of the first statistical analysis performed on the test results from the first subset of tests;
• performing the plurality of tests on an initial wafer of a first plurality of wafers;
• and
• performing statistical analysis of test results generated by the plurality of tests performed on the initial wafer, wherein said selecting the first subset of tests is done based upon the test results of the plurality of tests performed on the initial wafer.

An automated test equipment (ATE) apparatus for analyzing test results, the apparatus comprising:

• a measured value monitor operable to receive test results from a plurality of tests, wherein the plurality of tests are executed using at least one testing apparatus controlled by a test cell controller operable to execute a test program, wherein the test program comprises at least one process control rule, wherein the testing apparatus is communicatively coupled with a prober and a handler, and wherein the prober is operable to come in contact with at least one device under test (DUT) for performing a test;
• an adaptive value capture module operable to select a first subset of tests from the plurality of performed tests, wherein the measured value monitor is further operable to gather test results from the first subset of tests and perform a first statistical analysis on the gathered test results from the first subset of tests;
• and
• a statistical process control module operable to initiate at least one process control rule as determined by results of the first statistical analysis performed on the gathered test results from the first subset of tests;
• wherein the adaptive value capture module is further operable to perform statistical analysis of test results generated by the plurality of tests performed on an initial wafer and selects the first subset of tests based upon the test results of the plurality of tests performed on the initial wafer, wherein the adaptive value capture module is further operable to adaptively select the first subset of tests in response to statistical analysis of test results from the plurality of tests.