Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank provided with actinic ray-sensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and electronic device

An actinic ray-sensitive or radiation-sensitive resin composition, comprising:

• a resin (A) containing a repeating unit represented by General Formula (4);
• and
• a crosslinking agent (C) containing a polar group,
• wherein the crosslinking agent (C) is a compound represented by General Formula (1), or a compound in which two to five structures represented by General Formula (1) are connected via a linking group or a single bond represented by L1 in General Formula (3),
• wherein in General Formula (1), R1 to R6 each independently represent a hydrogen atom, an organic group having 1 to 50 carbon atoms, or a binding site to a linking group or a single bond represented by L1 in General Formula (3), provided that at least one of R2, R3, R4, R5, or R6 is a group represented by General Formula (2), and at least one of R1, R2, R3, R4, R5, R6, or L1 in General Formula (3) is a polar group selected from the following structures, or a group containing a polar group selected from the following structures as a partial structure,
• in General Formula (2), R7 represents an organic group having 1 to 30 carbon atoms,
• in General Formula (3), L1 represents a linking group or a single bond, * represents a binding site in any one of R1, R2, R3, R4, R5, and R6, and k is an integer of 2 to 5, and
• in General Formula (4), R11 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, R12 represents a hydrogen atom or an alkyl group, L11 represents a single bond or a linking group, X represents —Ar(OX1)m or —CO2X2 in which Ar represents an aromatic ring, X1 represents a hydrogen atom, a group having a non-acid-decomposable hydrocarbon structure, or a group having an acid-decomposable group, X2 represents a group capable of leaving by the action of an acid or a group having a group capable of leaving by the action of an acid, and m represents an integer of 1 to 12, or R12 and X may be bonded to each other to form a ring.