Method and device for determining information relating to the mass of a semiconductor wafer
AssigneeMetryx Limited
InventorsRobert John Wilby, Adrian Kiermasz
Life of this patent
Estimating the term…
Abstract
A method of determining information relating to the mass of a semiconductor wafer is disclosed. The method comprises loading the semiconductor wafer on to a measurement area of a weighing device having weight compensation means arranged to compensate for a predetermined weight loaded on to the measurement area; generating measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight; and using the measurement output to determine information relating to the mass of the semiconductor wafer. Also discloses is a corresponding weighing device for determining information relating to the mass of a semiconductor wafer.
Claims31
A method of determining information relating to the mass of a semiconductor wafer comprising:
- loading the semiconductor wafer on to a measurement area of a weighing device having weight compensation means arranged to compensate for a predetermined weight loaded on to the measurement area;
- loading a reference mass on to the measurement area of the weighing device;
- generating measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- and
- using the measurement output to determine information relating to the mass of the semiconductor wafer;
- wherein the density of the reference mass is within ±20%, or within ±10%, or within ±5% of the density of a semiconductor substrate of the semiconductor wafer.
A method of determining information relating to the mass of a semiconductor wafer comprising:
- loading the semiconductor wafer on to a measurement area of a weighing device having weight compensation means arranged to compensate for a predetermined weight loaded on to the measurement area;
- loading a reference mass on to the measurement area of the weighing device;
- generating measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- and
- using the measurement output to determine information relating to the mass of the semiconductor wafer;
- wherein the reference mass is made of the same material as a semiconductor substrate of the semiconductor wafer.
A method of determining information relating to the mass of a semiconductor wafer comprising:
- loading the semiconductor wafer on to a measurement area of a weighing device having weight compensation means arranged to compensate for a predetermined weight loaded on to the measurement area;
- loading a reference mass on to the measurement area of the weighing device;
- generating measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- and
- using the measurement output to determine information relating to the mass of the semiconductor wafer;
- wherein the reference mass is a semiconductor wafer.
A method of determining information relating to the mass of a semiconductor wafer comprising:
- loading the semiconductor wafer on to a measurement area of a weighing device having weight compensation means arranged to compensate for a predetermined weight loaded on to the measurement area;
- loading a reference mass on to the measurement area of the weighing device;
- generating measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- and
- using the measurement output to determine information relating to the mass of the semiconductor wafer;
- wherein:
- the reference mass comprises a first material having a first density and a second material having a second density;
- and
- the combined density of the reference mass is chosen based on the density of a semiconductor substrate of the semiconductor wafer.
A weighing device for determining information relating to the mass of a semiconductor wafer, the weighing device comprising:
- a support for loading the semiconductor wafer on to;
- weight compensation means arranged to compensate for a predetermined weight loaded on to the support;
- a measurement device arranged to generate measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- a reference mass;
- and
- the support including a reference mass support onto which the reference mass can be loaded and unloaded;
- wherein the reference mass is a semiconductor wafer.
A weighing device for determining information relating to the mass of a semiconductor wafer, the weighing device comprising:
- a support for loading the semiconductor wafer on to;
- weight compensation means arranged to compensate for a predetermined weight loaded on to the support;
- a measurement device arranged to generate measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- a reference mass;
- and
- the support including a reference mass support onto which the reference mass can be loaded and unloaded;
- wherein the reference mass is made of a semiconductor material.
A weighing device for determining information relating to the mass of a semiconductor wafer, the weighing device comprising:
- a support for loading the semiconductor wafer on to;
- weight compensation means arranged to compensate for a predetermined weight loaded on to the support;
- a measurement device arranged to generate measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- a reference mass;
- and
- the support including a reference mass support onto which the reference mass can be loaded and unloaded;
- wherein the reference mass comprises a first material having a first density and a second material having a second density.
A weighing device for determining information relating to the mass of a semiconductor wafer, the weighing device comprising:
- a support for loading the semiconductor wafer on to;
- weight compensation means arranged to compensate for a predetermined weight loaded on to the support;
- a measurement device arranged to generate measurement output indicative of a difference between the weight of the semiconductor wafer and the predetermined weight;
- a reference mass;
- and
- the support including a reference mass support onto which the reference mass can be loaded and unloaded;
- wherein the reference mass has a through-hole in which the support is received so that the reference mass is positioned around the support.
Dependencies are inferred from the claim text.