Device and method for substrate heating during transport

A substrate handling and heating system, comprising:

• a transfer chamber housing, defining a transfer chamber;
• a substrate handling robot disposed in the transfer chamber;
• a LED array, comprising a plurality of LEDs, disposed in the transfer chamber, wherein the LED array is disposed between a top surface of the transfer chamber housing and the substrate handling robot;
• and
• a controller in communication with the substrate handling robot and the LED array, such that the controller controls movement of the substrate handling robot and controls illumination of the LEDs in the LED array based on a path of a substrate traveling through the transfer chamber via the substrate handling robot, such that only a portion of the LEDs in the LED array is illuminated at a particular time.

A substrate handling and heating system, comprising:

• a transfer chamber housing, defining a transfer chamber;
• a substrate handling robot disposed in the transfer chamber;
• a LED array, comprising a plurality of LEDs, disposed in the transfer chamber, wherein the LED array is disposed between a top surface of the transfer chamber housing and the substrate handling robot;
• a substrate handling controller in communication with the substrate handling robot, such that the substrate handling controller controls movement of the substrate handling robot;
• and
• a LED array controller in communication with the LED array, such that the LED array controller receives information regarding a position or movement of an arm of the substrate handling robot and controls illumination of the LEDs in the LED array based on a path of a substrate traveling through the transfer chamber via the substrate handling robot.