Stage device and charged particle beam device using the same

A charged particle beam device comprising:

• a charged particle source;
• a sample stage moving a sample to which a beam discharged from the charged particle source is applied;
• and
• a vacuum chamber in which the sample stage is installed,
• wherein the sample stage is formed by upper and lower two stages,
• a slide unit is connected to a component which connects between a driving source and a table in a lower stage,
• the slide unit has a structure of being constrained by a rail fixed to a base, and
• the slide unit is arranged in a region where a place connecting to the lower-stage table is vertically projected to a plane on which the stage moves.

A stage device including a first table for placing a sample, a first drive mechanism moving the first table in a first direction, a second table for placing the first table and a second drive mechanism moving the second table in a second direction, the device comprising:

• a first rail and a second rail guiding the second table to the second direction;
• a third rail guiding the second table to the same direction as the first rail and the second rail;
• a slide unit moving on the third rail together with the second table;
• and
• a connecting member interposed between the second table and the second drive mechanism,
• wherein the connecting member and the slide unit are arranged so that a virtual straight line extending in a third direction orthogonal to the first direction and the second direction passes therethrough.