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US 9,886,009 B2Granted
Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
AssigneeApplied Materials, Inc.
InventorJames Moyne
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Abstract
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.
Claims20
A computer implemented method comprising:
- identifying, with a multi-algorithm predictive subsystem that is designed to facilitate switching between predictive algorithms, a plurality of predictive algorithms including first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility;
- identifying a quality threshold that is based on predictions of data and actual measurement data to determine when to switch between the first and second adaptive predictive algorithms;
- comparing a quality for prediction with the quality threshold when actual measurement data for a current prediction cycle is not available;
- and
- invoking, when the actual measurement data for a current prediction cycle is not available, the first adaptive predictive algorithm if the quality for prediction is less than or approximately equal to the quality threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
2 more elements
A computer-readable non-transitory storage medium comprising executable instructions to cause a processor to perform operations, the instructions comprising:
- identifying, with a multi-algorithm predictive subsystem that is designed to facilitate switching between predictive algorithms, a plurality of predictive algorithms including first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility;
- identifying a quality threshold that is based on predictions of data and actual measurement data to determine when to switch between the first and second adaptive predictive algorithms;
- comparing a quality for prediction with the quality threshold when actual measurement data for a current prediction cycle is not available;
- and
- invoking, when the actual measurement data for a current prediction cycle is not available, the first adaptive predictive algorithm if the quality for prediction is less than or approximately equal to the quality threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
2 more elements
A computer system comprising:
- a memory to store a plurality of predictive algorithms;
- and
- and at least one processing device, coupled to the memory, that is configured to execute processing logic to:
- identify the plurality of predictive algorithms including first and second adaptive predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility;
- identify a quality threshold that is based on predictions of data and actual measurement data to determine when to switch between the first and second adaptive predictive algorithms;
- compare a quality for prediction with the quality threshold when actual measurement data for a current prediction cycle is not available;
- and
- invoking, when the actual measurement data for a current prediction cycle is not available, the first adaptive predictive algorithm if the quality for prediction is less than or approximately equal to the quality threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
5 more elements
Dependencies are inferred from the claim text.