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US 9,881,788 B2Granted
Back side deposition apparatus and applications
AssigneeLam Research Corporation
InventorsYunsang Kim, Kaushik Chattopadhyay, Gregory Sexton, Youn Gi Hong
Life of this patent
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Abstract
The embodiments disclosed herein pertain to methods and apparatus for depositing stress compensating layers and sacrificial layers on either the front side or back side of a substrate. In various implementations, back side deposition occurs while the wafer is in a normal front side up orientation. The front/back side deposition may be performed to reduce stress introduced through deposition on the front side of the wafer. The back side deposition may also be performed to minimize back side particle-related problems that occur during post-deposition processing such as photolithography.
Claims9
An apparatus for depositing a film on a back side of a substrate, comprising:
- a reaction chamber;
- a substrate support in the reaction chamber configured to support the substrate at or near its periphery during deposition such that an active region on a front side of the substrate does not contact any portion of the reaction chamber, and such that a back side of the substrate is substantially exposed;
- an electrode positioned above the substrate support;
- a second electrode positioned below the substrate support;
- a deposition region defined on one side by the back side of the substrate, when present, wherein a height of the deposition region is between about 5-30 mm;
- a front side gap defined on one side by the front side of the substrate, when present, wherein a height of the front side gap is about 0.5 mm or less;
- a top side inlet for providing an inert gas to the front side gap, wherein the top side inlet is positioned to deliver the inert gas near the center of the front side of the substrate, when the substrate is present, such that the inert gas flows from the center of the substrate outwards over the front face of the substrate;
- a deposition region inlet for providing a reactant gas to the deposition region;
- and
- a controller configured to execute instructions for (i) using the electrode and the second electrode to generate a plasma in the deposition region such that the back side of the substrate is exposed to the plasma to deposit the film on the back side of the substrate without depositing film on the front side of the substrate, (ii) generating the plasma such that a thickness of a plasma sheath on the plasma is greater than the height of the front side gap to thereby prevent the plasma from penetrating the front side gap, and (iii) controlling a flow of the inert gas through the top side inlet to prevent material from depositing on the front side of the substrate during deposition on the back side of the substrate;
- wherein a position of the substrate support and a position of the electrode are adjustable, and wherein adjusting the position of the substrate support and the position of the electrode varies the height of the deposition region.
8 more elements
A multi-tool semiconductor processing apparatus, comprising:
- a front side module for depositing material on a front side of a substrate, the front side of the substrate comprising an active region on the substrate;
- a back side module for depositing material on a back side of the substrate, the back side module comprising:
- a substrate support configured to support the substrate at or near its periphery during deposition such that the active region on a front side of the substrate does not contact any portion of the back side module, and such that a back side of the substrate is substantially exposed,
- an electrode positioned above the substrate support,
- a second electrode positioned below the substrate support,
- a deposition region defined on one side by the back side of the substrate, when present, wherein the deposition region has a height between about 5-30 mm,
- a front side gap defined on one side by the front side of the substrate, when present, wherein the front side gap has a height of about 0.5 mm or less, wherein a position of the substrate support and a position of the electrode are adjustable, and wherein moving the substrate support and electrode varies the height of the deposition region, wherein the back side module is configured to deliver gas phase reactants;
- a top side inlet for providing an inert gas to the front side gap, wherein the top side inlet is positioned to deliver the inert gas near the center of the front side of the substrate, when the substrate is present, such that the inert gas flows from the center of the substrate outwards over the front face of the substrate;
- and
- a controller configured to execute instructions for:
- depositing material on the front side of the substrate in the front side module,
- transferring the substrate to the back side module, and
- using the electrode and the second electrode to generate a plasma in the deposition region such that the back side of the substrate is exposed to the plasma to deposit material on the back side of the substrate without concurrently depositing film on the front side of the substrate,
- generating the plasma such that a thickness of a plasma sheath on the plasma is greater than the height of the front side gap to thereby prevent the plasma from penetrating the front side gap, and
- controlling a flow of the inert gas through the top side inlet to prevent material from depositing on the front side of the substrate during deposition on the back side of the substrate.
12 more elements
Dependencies are inferred from the claim text.