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US 9,878,933 B2Granted
Method for the manufacture of doped quartz glass
AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsMalte Schwerin, Martin Trommer, Steffen Zwarg
Life of this patent
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Abstract
One aspect relates to a method for the manufacture of doped quartz glass. Moreover, one aspect relates to quartz glass obtainable according to the method including providing a soot body, treating the soot body with a gas, heating an intermediate product and vitrifying an intermediate product.
Claims12
A method for the manufacture of doped quartz glass, comprising:
- a) providing a soot body, whereby the soot body has a mean density in the range of 18 to 30% relative to the relative density of quartz glass;
- b) treating the soot body with a gas comprising a fluorine-containing compound in a process chamber while forming a fluorinated intermediate product (A), whereby the mean density of intermediate product (A) increases by maximally 30% relative to the mean density of the soot body in step a), wherein the treatment of the soot body in step b) takes place at a temperature in a range of 700 to 1,000° C.;
- c) heating fluorinated intermediate product (A) in the absence of chlorine to a temperature in the range of 950 to 1,150° C., and above the temperature used for the treatment of the soot body in step b), while forming a fluorinated intermediate product (B), whereby the mean density of fluorinated intermediate product (B) is 40 to 80% of the relative density of quartz glass;
- and
- d) vitrifying the fluorinated intermediate product (B) in a process chamber, whereby the pressure inside the process chamber is lower than the pressure outside the process chamber, while forming the doped quartz glass.
2 more elements
A method for the manufacture of doped quartz glass, comprising:
- providing a soot body, the soot body comprising a mean density in the range of 18 to 30% relative to the relative density of quartz glass;
- treating the soot body with a gas comprising a fluorine-containing compound in a process chamber while forming a first fluorinated intermediate product, the mean density of the first fluorinated intermediate product increasing by maximally 30% relative to the mean density of the provided soot body, wherein the treatment of the soot body in step b) takes place at a temperature in a range of 700 to 1,000° C.;
- heating the first fluorinated intermediate product in the absence of chlorine to a temperature in the range of 950 to 1,150° C., and above the temperature used for the treatment of the soot body in step b), while forming a second fluorinated intermediate product, the mean density of the second fluorinated intermediate product being 40 to 80% of the relative density of quartz glass;
- and
- vitrifying the second fluorinated intermediate product in a process chamber, the pressure inside the process chamber being lower than the pressure outside the process chamber, while forming the doped quartz glass.
2 more elements
Dependencies are inferred from the claim text.