# US 9,872,606 B2 · Adaptive control of a fiber scanner with piezoelectric sensing

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- Number: US 9,872,606 B2
- Document ID: US9872606B2
- Status: Granted
- Kind: B2
- Application number: 15/107,894
- Filed: 2014-12-24
- Published: 2016-11-10
- Granted: 2018-01-23
- Earliest claimed: 2013-12-27
- Assignees: University of Washington through its Center for Commercialization
- Applicants: University of Washington Through Its Center for Commercialization
- Inventors: Ivan L. Yeoh; Per G. Reinhall; Eric J. Seibel; Matthew J. Kundrat
- Web page: https://patentgrep.com/patent/US9872606B2

## CPC

- A61B 1/00172: {with means for scanning}
- A61B 1/00006: {of control signals}
- A61B 1/00165: {with light-conductive means, e.g. fibre optics (A61B1/07 takes precedence)}
- A61B 1/042: {characterised by a proximal camera, e.g. a CCD camera}
- A61B 1/07: using light-conductive means, e.g. optical fibres
- G02B 26/103: {having movable or deformable optical fibres, light guides or waveguides as scanning elements (light guides per se G02B6/00)}
- H10N 30/101: {with electrical and mechanical input and output, e.g. having combined actuator and sensor parts}
- H10N 30/204: {using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders}
- H10N 30/2046: {adapted for multi-directional bending displacement}
- H10N 30/802: {Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits}
- A61N 2005/063: {comprising light transmitting means, e.g. optical fibres}
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)

## Abstract

Improved systems, methods, and devices relating to optical fiber scanners are provided. In one aspect, a scanning apparatus includes an optical fiber and a piezoelectric actuator coupled to the optical fiber to deflect a distal end of the optical fiber in a scanning pattern. The apparatus can include drive circuitry coupled to the piezoelectric actuator, sense circuitry electrically coupled to the piezoelectric actuator and the drive circuitry to determine displacement of the piezoelectric actuator, and a processor coupled to the drive circuitry and the sense circuitry to drive the piezoelectric actuator in response to the displacement.

## Claims

### Claim 1

A scanning apparatus, the apparatus comprising:
an optical fiber;
a piezoelectric actuator coupled to the optical fiber to deflect a distal end of the optical fiber in a scanning pattern;
drive circuitry coupled to the piezoelectric actuator; and
a processor coupled to the drive circuitry and sense circuitry to drive the piezoelectric actuator in response to displacement of the piezoelectric actuator, wherein the sense circuitry is electrically coupled to the piezoelectric actuator and the drive circuitry to determine the displacement of the piezoelectric actuator.

### Claim 2 (depends on 1)

An apparatus as in claim 1, wherein the drive circuitry is configured to generate piezoelectric drive signals and the sense circuitry is configured to obtain piezoelectric displacement signals, and wherein the sense circuitry is configured to isolate the piezoelectric displacement signals from the piezoelectric drive signals when the drive circuitry drives the piezoelectric actuator with the piezoelectric drive signals.

### Claim 3 (depends on 2)

An apparatus as in claim 2, wherein the piezoelectric actuator comprises one or more of the following: a piezoelectric tube, a piezoelectric stack actuator, or a piezoelectric stack actuator with a flexure.

### Claim 4 (depends on 2)

An apparatus as in claim 2, wherein the piezoelectric drive signals comprise one or more of: piezoelectric voltage drive signals or piezoelectric charge drive signals; and the piezoelectric displacement signals comprise one or more of: piezoelectric voltage displacement signals or piezoelectric charge displacement signals.

### Claim 5 (depends on 1)

An apparatus as in claim 1, wherein the piezoelectric actuator comprises a first input corresponding to a first axis of movement along a first physical dimension and a second input corresponding to a second axis of movement along a second physical dimension, and wherein the drive circuitry comprises first drive circuitry coupled to the first input and second drive circuitry coupled to the second input, and wherein the sense circuitry comprises first sense circuitry coupled to the first input and second sense circuitry coupled to the second input.

### Claim 6 (depends on 1)

An apparatus as in claim 1, wherein the sense circuitry comprises a bridge circuit comprising a balance leg and an actuator leg in parallel with the balance leg, the actuator leg corresponding to an axis of the piezoelectric actuator, the drive circuitry coupled to the balance leg and the actuator leg in order to drive the balance leg in parallel with the actuator leg, the balance leg comprising a first plurality of resistors and a first capacitor coupled between the first plurality of resistors, the actuator leg comprising a second plurality of resistors and a second capacitor coupled between the second plurality of resistors and wherein the balance leg and the actuator leg are configured so as to enable the sense circuitry to isolate a piezoelectric displacement signal from a piezoelectric drive signal.

### Claim 7 (depends on 6)

An apparatus as in claim 6, wherein the first capacitor comprises a first plurality of capacitors and the second capacitor comprises a second plurality of capacitors, and wherein the first plurality of resistors comprises a first plurality of pairs of adjacent resistors and the second plurality of resistors comprises a second plurality of pairs of adjacent resistors and wherein the first plurality of capacitors is connected between the first plurality of pairs of adjacent resistors and the second plurality of capacitors is connected between the second plurality of pairs of adjacent resistors, and wherein the first plurality of capacitors comprises a balance capacitor connected in series between the first plurality of pairs of adjacent resistors and the second plurality of capacitors comprises the piezoelectric actuator connected in series between the second plurality of pairs of adjacent resistors, in order to in order to isolate the piezoelectric displacement signal from the piezoelectric drive signal.

### Claim 8 (depends on 1)

An apparatus as in claim 1, wherein the sense circuitry comprises one or more components corresponding to one or more of a capacitance or a resistance of a wire electrically coupling the sense circuitry to the piezoelectric actuator.

### Claim 9 (depends on 8)

An apparatus as in claim 8, wherein the sense circuitry comprises a bridge circuit comprising a balance leg and an actuator leg,
the balance leg comprising one or more of the following: a first wire capacitor having a first wire charge (Qw2), a first plurality of wire resistors each having a wire resistance (Rw), or a balance capacitor having a balance charge (Qb); and
the actuator leg comprising one or more of the following: a second wire capacitor having a second wire charge (Qw1), a second plurality of wire resistors each having a wire resistance (Rw), or a piezoelectric capacitor having a piezoelectric charge (Qp) opposite the balance charge.

### Claim 10 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to determine first and second eigendirections of the piezoelectric actuator in response to isolated displacement signals of the piezoelectric actuator driven along first and second physical axes.

### Claim 11 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to control displacement of the distal end of the optical fiber with one or more of the following: an adaptive control loop, an adaptive feedforward control loop, a frame sequential feedback control loop, or a pixel sequential feedback control loop.

### Claim 12 (depends on 11)

An apparatus as in claim 11, wherein the processor comprises instructions to control displacement of the distal end of the optical fiber with the adaptive control loop and to identify one or more control parameters with signals from the sense circuitry and wherein the processor comprises instructions to update the one or more control parameters of the adaptive control loop for each of a plurality of sequential image frames.

### Claim 13 (depends on 12)

An apparatus as in claim 12, wherein the one or more control parameters of the adaptive control loop comprises one or more of a first eigendirection, a second eigendirection, a first damped resonance frequency, a second damped resonance frequency, a first phase-at-braking or a second phase-at-braking, in response to a signal from the sense circuitry.

### Claim 14 (depends on 11)

An apparatus as in claim 11, wherein the processor comprises instructions to control displacement of the distal end of the optical fiber with the pixel sequential feedback control loop and to identify one or more control parameters with signals from the sense circuitry and wherein the processor comprises instructions to update the one or more control parameters of the pixel sequential feedback control loop for each pixel of a sequential image frame.

### Claim 15 (depends on 14)

An apparatus as in claim 14, wherein the processor comprises instructions to direct the distal end of the optical fiber to a sequence of pixel locations and to measure displacement of the actuator at the pixel locations and determine an error at each of the pixel locations and adjust a drive signal of the drive circuitry in real time in order to correct the error at said each of the plurality of pixel locations.

### Claim 16 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to control displacement of the distal end of the optical fiber with a model comprising one or more of a state space electromechanical model or a vibration modal model.

### Claim 17 (depends on 16)

An apparatus as in claim 16, wherein the model comprises the state space electromechanical model and one or more parameters of the state space electromechanical correspond to one or more of a stiffness of the piezoelectric actuator, a mass of the piezoelectric actuator, a damping of the piezoelectric actuator, a stiffness of the optical fiber, a mass of the optical fiber, or a damping of the optical fiber.

### Claim 18 (depends on 16)

An apparatus as in claim 16, wherein the model comprises the vibration modal model and one or more parameters of the general vibration mode model correspond to one or more vibration modes of the piezoelectric actuator and/or optical fiber.

### Claim 19 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to identify control parameters using one or more of a batch least squares regression or a modal matrix transformation.

### Claim 20 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to adjust an identified parameterized controller by searching a parameter space of the parameterized controller in order to tune the parameterized controller.

### Claim 21 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to determine a scan trajectory for the optical fiber such that the scanning pattern fills a field of view of an image and reduces frequency content of unwanted vibration modes of the optical fiber having frequencies away from frequencies of a selected vibration mode of the optical fiber.

### Claim 22 (depends on 1)

An apparatus as in claim 1, wherein the processor comprises instructions to progressively adjust a drive signal based on real-time feedback control signal, and wherein the drive signal is adjusted on a slower time scale than the real-time feedback control signal, the slower time scale determined based at least in part on system repeatability among sweeps of the actuator.

### Claim 23 (depends on 1)

An apparatus as in claim 1, wherein a duty cycle of the scanning apparatus is within a range between any two of the following: 70%, 75%, 80%, 85%, 90%, 95%, 99%, 99.9%, 99.99%, 99.999%.

### Claim 24 (depends on 1)

An apparatus as in claim 1, wherein at least one of the sense circuitry or drive circuitry comprises bipolar circuitry.

### Claim 25 (depends on 1)

An apparatus as in claim 1, wherein the optical fiber can be represented by a plurality of mechanical components each characterized by one or more of a mass, stiffness, or damping, and the piezoelectric actuator can be represented by a plurality of mechanical components each characterized by one or more of a mass, stiffness, or damping, and wherein a sensed voltage obtained by the sense circuitry corresponds to an energy output of the mechanical components of the optical fiber and/or piezoelectric actuator.