Extreme ultraviolet light generation device
AssigneeGigaphoton Inc.
InventorsAtsushi Ueda, Shinji Nagai, Yoshifumi Ueno, Tamotsu Abe
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Abstract
An extreme ultraviolet light generation device is to generate extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma. The device may include a chamber, a magnet configured to form a magnetic field in the chamber, and an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit.
Claims20
An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
- a chamber;
- a magnet configured to form a magnetic field in the chamber;
- and
- an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit, wherein
- the collision unit includes a plurality of collision surfaces disposed to be inclined with respect to the magnetic field.
An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
- a chamber;
- a magnet configured to form a magnetic field in the chamber;
- and
- an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit;
- and
- an exhaust pump, wherein
- the ion catcher includes a tubular member having a first end and a second end,
- the first end has an opening in a direction along the magnetic field,
- the collision unit is disposed between the first end and the second end, and
- the exhaust pump is connected between the first end and the second end to exhaust gas out of the tubular member.
An extreme ultraviolet light generation device for generating extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma, comprising:
- a chamber;
- a magnet configured to form a magnetic field in the chamber;
- and
- an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit, wherein
- the ion catcher includes a tubular member having a first end and a second end,
- the first end has an opening in a direction along the magnetic field,
- the collision unit is disposed between the first end and the second end, and
- the tubular member has a tapered shape.
Dependencies are inferred from the claim text.