Ultrasonic transducers and methods of manufacturing the same

An ultrasonic transducer, comprising:

• a substrate;
• a plurality of first electrode layers on the substrate, with spaces between the first electrode layers;
• an insulating layer between the substrate and the first electrode layers;
• a support portion on the first electrode layers;
• a thin film supported by the support portion, with cavities between each of the first electrode layers and the thin film;
• and
• a second electrode layer on the thin film.

A method of manufacturing an ultrasonic transducer, the method comprising:

• forming a wafer comprising a first substrate, a first insulating layer, and a thin film;
• depositing a second insulating layer on the thin film;
• forming cavities in the second insulating layer by etching the second insulating layer;
• attaching a second substrate onto the second insulating layer;
• forming a plurality of first electrode layers that are electrically independent of one another by etching and penetrating the second substrate;
• depositing a third insulating layer on the first electrode layers;
• attaching a third substrate onto the third insulating layer;
• removing the first substrate and the first insulating layer;
• and
• forming a second electrode layer on the thin film.