Noise mitigating microphone system
AssigneeInvenSense, Inc.
InventorsDavid Bolognia, Brian Moss
Life of this patent
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Abstract
A microphone system has a package with a top, a bottom, and four sides that at least in part form an interior chamber. One of the sides forms an inlet aperture for communicating the inlet chamber with the exterior environment. The system also has first and second microphone dies, in a stacked relationship, respectively having a first and second diaphragms. A circuit die, positioned in electrical communication with the first and second microphone dies, is configured to mitigate vibrational noise from the first microphone die using a signal produced by the second microphone die or vice versa. The first and second microphone dies are positioned so that the first and second diaphragms are substantially the same distance from the inlet aperture in the side.
Claims27
A microphone package comprising:
- a lid with side walls, each side wall having an inner surface, one of the side walls of the lid having a specially-shaped contour to receive a complementary upwardly extending portion of a base, the upwardly extending portion of the base forming a portion of an audio input port;
- an interior chamber;
- and
- the base and the lid forming the interior chamber,
- wherein the audio input port enables ingress of audio signals into the interior chamber, the base having,
- a circuit die,
- a plurality of location protrusions, each positioned along an edge of the base to precisely guide and position the lid onto the base.
A method of making a microphone package comprising:
- securing a plurality of circuit dies to a plurality of substrates;
- securing the plurality of substrates to a plurality of bases;
- securing a plurality of microphone dies to the plurality of bases;
- electrically coupling the plurality of circuit dies and the plurality of microphone dies;
- coupling a plurality of lids to the plurality of bases, wherein each of the plurality of lids together with a corresponding one of the plurality of bases forms an interior chamber;
- coupling the plurality of bases to each other;
- and
- forming side walls for each of the plurality of the bases, each side wall having an inner surface;
- forming a specially-shaped contour from one of the side walls of one of the plurality of the lids;
- the specially-shaped contour receiving a complementary upwardly extending portion of one of the plurality of the bases;
- the upwardly extending portion forming a portion of an audio input port to enable ingress of audio signals into the interior chamber.
Dependencies are inferred from the claim text.