Piezoelectric vibrator element, and piezoelectric vibrator
AssigneeSII Crystal Technology Inc.
InventorNaoya Ichimura
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Abstract
A piezoelectric vibrator element includes a pair of vibrating arms extending from a base, and having a groove on each of opposing principal surfaces in the longitudinal direction of the vibrating arms. Two systems of excitation electrodes are included on the side surfaces and the opposing principal surfaces, and in the grooves of the vibrating arms. A width of a bank part formed by a side surface of the vibrating arms and a side surface of the groves is W0, and the separation distance between the excitation electrodes on the opposing principal surfaces is W1, such that 1 μm<W1<3 μm and W0>W1.
Claims8
A piezoelectric vibrator element comprising:
- a base;
- a pair of vibrating arms extending side by side from the base;
- a first excitation electrode on an outer peripheral surface of each of the vibrating arms;
- and
- a second excitation electrode on the outer peripheral surface of each of the vibrating arms,
- wherein an electrode separation width W1 between the first excitation electrode and the second excitation electrode on opposing principal surfaces of each of the vibrating arms is defined by 1 μm<W1<3 μm,
- wherein the opposing principal surfaces of each of the vibrating arms include grooves along a longitudinal direction of the vibrating arms, and
- wherein a width of a bank part W0 between a side surface of each of the vibrating arms and an inner side surface of each of the groves, including the first and second excitation electrodes, is less than 10 μm.
Dependencies are inferred from the claim text.