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US 9,871,416 B2Granted
Resonant type high frequency power supply device
AssigneeMitsubishi Electric Engineering Company Limited
InventorsYoshiyuki Akuzawa, Kiyohide Sakai, Toshihiro Ezoe, Yuki Ito
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Abstract
A resonant type high frequency power supply device provided with a power semiconductor element that performs a switching operation at a high frequency exceeding 2 MHz, the resonant type high frequency power supply device including a variable inductor that makes an adjustment to the amplitude of a device output voltage.
Claims5
A high frequency power supply device, comprising:
- a power element that performs a switching operation to generate a high frequency output voltage exceeding 2 MHz;
- a high frequency pulse drive circuit that drives said power element by applying a pulse-shaped driving voltage to said power element;
- a variable pulse signal generating circuit that provides a pulse-shaped voltage signal for said high frequency pulse drive circuit to generate said pulse-shaped driving voltage;
- a bias power supply circuit that supplies driving power to said variable pulse signal generating circuit and said high frequency pulse drive circuit;
- and
- a variable inductor to adjust an amplitude of a device output voltage, said variable inductor including a coil having a length, the variable inductor adjusting by changing the length of said coil.
3 more elements
Dependencies are inferred from the claim text.