Transistor manufacturing method and transistor
AssigneeNikon Corporation
InventorsShohei Koizumi, Takashi Sugizaki, Yusuke Kawakami
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AssigneeNikon Corporation
InventorsShohei Koizumi, Takashi Sugizaki, Yusuke Kawakami
Estimating the term…
A transistor manufacturing method includes: forming a first insulator layer of which formation material is a fluorine-containing resin, on a substrate having a source electrode, a drain electrode, and a semiconductor layer so as to cover the semiconductor layer; forming a second insulator layer to cover the first insulator layer; forming a base film on at least part of a surface of the second insulator layer; and after depositing a metal which is an electroless plating catalyst on a surface of the base film, forming a gate electrode on the surface of the base film by electroless plating, wherein the forming of the base film is performed by applying a liquid substance which is a formation material of the base film to the surface of the second insulator layer, and the second insulator layer has a higher lyophilic property with respect to the liquid substance than the first insulator layer.
A transistor manufacturing method comprising:
A transistor comprising:
Dependencies are inferred from the claim text.