Electronic device
AssigneeSK hynix Inc.
InventorsHyung-Suk Lee, Young-Ju Lee, Sook-Joo Kim
Life of this patent
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Abstract
An electronic device including a semiconductor memory is provided. The semiconductor memory may include an interlayer dielectric layer having a hole; a conductive pattern filled in the hole; and a variable resistance element coupled with the conductive pattern over the conductive pattern and storing different data according to a resistance change, wherein the conductive pattern includes a carbon-containing conductive layer in a region adjacent to the variable resistance element.
Claims17
An electronic device comprising a semiconductor memory, wherein the semiconductor memory includes:
- an interlayer dielectric layer having a hole;
- a conductive pattern filled in the hole;
- and
- a variable resistance element coupled with the conductive pattern over the conductive pattern and storing different data according to a resistance change,
- wherein the conductive pattern includes a carbon-containing conductive layer in a region adjacent to the variable resistance element.
An electronic device comprising a semiconductor memory, wherein the semiconductor memory includes:
- an interlayer dielectric layer having a hole;
- a conductive pattern filled in the hole;
- and
- a variable resistance element coupled with the conductive pattern over the conductive pattern and storing different data according to a resistance change,
- wherein the conductive pattern includes a carbon-containing conductive layer in a region adjacent to the variable resistance element, wherein the conductive pattern includes a first conductive pattern, a second conductive pattern formed over the first conductive pattern, and the carbon-containing conductive layer formed over the second conductive pattern.
An electronic device comprising a semiconductor memory, wherein the semiconductor memory includes:
- an interlayer dielectric layer having a hole;
- a conductive pattern filled in the hole;
- and
- a variable resistance element coupled with the conductive pattern over the conductive pattern and storing different data according to a resistance change,
- wherein the conductive pattern includes a carbon-containing conductive layer in a region adjacent to the variable resistance element, wherein the carbon-containing conductive layer has a bottom surface of which a center portion is dent compared to an edge.
Dependencies are inferred from the claim text.