Piezoelectric ceramic, method for manufacturing the same, piezoelectric element, and electronic apparatus
AssigneeCanon Kabushiki Kaisha
InventorsJumpei Hayashi, Takayuki Watanabe, Akira Uebayashi, Kenichi Takeda
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Abstract
A piezoelectric ceramic includes a perovskite-type metal oxide containing barium titanate, and Mn. When a surface thereof along the remanent polarization direction is subjected to X-ray diffraction analysis at room temperature, the ratio of the diffraction intensity of the (002) plane to the diffraction intensity of the (200) plane is 1.0 or more, the diffraction peak of the (002) plane has a half width of 1.2° or less, and the lattice constant of the c-axis thereof and the lattice constant of the a-axis thereof satisfy the relationship 1.004≦c/a≦1.010.
Claims24
A piezoelectric ceramic having a remanent polarization, comprising:
- a perovskite-type metal oxide containing barium titanate;
- and Mn,
- wherein when a surface thereof along the direction of the remanent polarization is a measurement surface subjected to X-ray diffraction analysis at room temperature, the ratio of the diffraction intensity of the (002) plane of the measurement surface to the diffraction intensity of the (200) plane of the measurement surface is 1.0 or more, the diffraction peak of the (002) plane has a half width of 1.2° or less, and the lattice constant of the c-axis thereof and the lattice constant of the a-axis thereof satisfy the relationship 1.004≦c/a≦1.010.
Dependencies are inferred from the claim text.