Light emitting device

A light emitting device comprising:

• a substrate having a surface and a rear surface;
• a semiconductor laminate structure portion having an n-type semiconductor layer, a light emitting layer and a p-type semiconductor layer which are laminated in series on the surface of the substrate, the p-type semiconductor layer having a surface on a side opposite to the light emitting layer;
• a plurality of concave portions which are discretely arranged to be formed in a predetermined current injection region at the surface of the p-type semiconductor layer to penetrate in-between portions of the semiconductor laminate structure portion, extend into the semiconductor laminate structure portion from the p-type semiconductor layer, and in a plan view the plurality of concave portions being arranged in a matrix pattern;
• a transparent electrode layer which is formed on the surface of the p-type semiconductor layer and covers a whole area of the predetermined current injection region on the surface of the p-type semiconductor layer or a substantially whole area of the predetermined current injection region on the surface of the p-type semiconductor layer;
• a p-side electrode which is formed on a surface of the transparent electrode layer on a side opposite to the p-type semiconductor layer;
• and
• a convex region formed by the semiconductor laminate structure portion, each part of the convex region between the plurality of concave portions having a current injected thereinto from the transparent electrode layer,
• wherein the concave portions are formed to extend from the surface of the transparent electrode layer, on a side opposite to the semiconductor laminate structure portion, through the transparent electrode layer, the p-type semiconductor layer, and the light-emitting layer, and penetrating the n-type semiconductor layer in a thickness direction,
• a side surface of an inner wall surface of each concave portion has an inclined plane which is inclined with respect to the surface of the substrate, and
• an insulating layer is formed on the entire inner wall surface of each concave portion.