Serial capacitor device with middle electrode contact
AssigneeGlobalfoundries Inc.
InventorsKi Young Lee, Woong Lae Cho, Jae Ho Joung
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Abstract
A capacitor includes a bottom electrode and a top electrode positioned above the bottom electrode. The top electrode and the bottom electrode are conductively coupled to one another. A middle electrode is positioned between the bottom electrode and the top electrode. A lower dielectric layer is positioned between the bottom electrode and the middle electrode. An upper dielectric layer is positioned between the middle electrode and the top electrode. A first contact is conductively coupled to the top electrode. A second contact is conductively coupled to the middle electrode.
Claims17
A capacitor, comprising:
- a bottom electrode;
- a top electrode positioned above said bottom electrode, a conductive via connecting said top electrode and said bottom electrode directly to one another, said conductive via having a first end directly contacting a top surface of said bottom electrode and a second end directly contacting a bottom surface of said top electrode;
- a middle electrode positioned vertically between said bottom electrode and said top electrode;
- a lower dielectric layer positioned between said bottom electrode and said middle electrode;
- an upper dielectric layer positioned between said middle electrode and said top electrode;
- a first contact conductively coupled to said top electrode;
- and
- a second contact conductively coupled to said middle electrode.
A capacitor, comprising:
- a bottom electrode;
- a top electrode positioned above said bottom electrode, said top electrode and said bottom electrode being conductively coupled to one another;
- a middle electrode positioned between said bottom electrode and said top electrode, wherein said middle electrode comprises an extension portion that is coplanar with said top electrode;
- a lower dielectric layer positioned between said bottom electrode and said middle electrode;
- an upper dielectric layer positioned between said middle electrode and said top electrode;
- an isolation region of dielectric material formed above a first portion of said upper dielectric layer positioned above a horizontal portion of said extension portion and laterally disposed between a second portion of said upper dielectric layer positioned adjacent a vertical portion of said extension portion and said top electrode, said isolation region and said upper dielectric layer providing a first separation between said middle electrode and said top electrode adjacent said vertical portion having a first width greater than a second width of a second separation between said middle electrode and said top electrode adjacent said horizontal portion;
- a first contact conductively coupled to said top electrode;
- and
- a second contact conductively coupled to said middle electrode.
Dependencies are inferred from the claim text.