Photoelectric conversion device, image pickup system, and method for manufacturing photoelectric conversion device

A photoelectric conversion device comprising:

• a first insulator film disposed on a silicon layer having a photoelectric conversion region, the first insulator film having a portion overlapped with the photoelectric conversion region;
• a silicon oxide film disposed on the first insulator film, the silicon oxide film having a portion overlapped with the photoelectric conversion region;
• an electroconductive member disposed between the first insulator film and the silicon oxide film;
• a silicon oxide layer disposed between the electroconductive member and the silicon oxide film;
• and
• a second insulator film disposed on the silicon oxide film, the second insulator film having a portion overlapped with the photoelectric conversion region and containing hydrogen, wherein
• the portion overlapped with the photoelectric conversion region of the silicon oxide film is in contact with the portion overlapped with the photoelectric conversion region of the first insulator film and in contact with the portion overlapped with the photoelectric conversion region of the second insulator film, and
• a density of the silicon oxide film is greater than a density of the silicon oxide layer.