Electrical fuse and/or resistor structures
AssigneeInternational Business Machines Corporation
InventorsVeeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz, Juntao Li
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Abstract
Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.
Claims11
A method comprising:
- forming metal gates having a capping material on a top surface thereof;
- protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material;
- forming an insulator material and metal material within the recess;
- removing excess insulator material formed on the metal material outside the recess;
- and
- forming a contact in direct electrical contact with the metal material.
A method comprising:
- forming metal gate structures in a dielectric material;
- forming a capping material over the metal gate structures;
- forming a mask over the capping material of the metal gate structures;
- recessing the dielectric material between the metal gate structures by an etching process while the mask over the capping material protects the capping material and the metal gate structures;
- depositing insulator material and metal material within the recess in the dielectric material;
- removing excess insulator material formed on the metal material outside the recess;
- and
- forming a contact in direct electrical contact with the metal material.
Dependencies are inferred from the claim text.