Substrate processing apparatus and substrate processing method

A substrate processing method for removing from a substrate having a concavo-convex pattern formed on a surface of the substrate, a solid material with which a concave portion of the concavo-convex pattern is filled,

• the method comprising a heating step of heating the substrate disposed in a processing chamber,
• wherein:
• the solid material is formed by evaporating a solvent in a sublimable substance solution supplied to the concave portion, the sublimable substance solution containing a sublimable substance that sublimates at a temperature equal to or higher than a first temperature, and an impurity that evaporates at a temperature equal to or higher than a second temperature that is higher than the first temperature;
• and
• in the heating step, the substrate disposed in the processing chamber is heated to a temperature that is equal to or higher than the second temperature while discharging an atmosphere inside the processing chamber.