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US 9,870,902 B2Granted
Li-containing oxide target assembly
AssigneeKobelco Research Institute, Inc.
InventorsYuichi Taketomi, Moriyoshi Kanamaru, Shintaro Yoshida
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Abstract
Provided is a target assembly which is manufactured by bonding a Li-containing oxide sputtering target and an Al-based or Cu-based backing plate through a bonding material. The Li-containing oxide target assembly does not undergo warping or cracking during the bonding. The Li-containing oxide target assembly according to the present invention is manufactured by bonding a Li-containing oxide sputtering target to a backing plate via a bonding material, and has bending strength of 20 MPa or larger.
Claims17
A Li-based oxide target assembly, comprising:
- a Li-based oxide sputtering target,
- a backing plate, and
- a bonding material,
- wherein;
- the Li-based oxide sputtering target consists of Li, O, at least one element selected from the group consisting of Co, Mn, Ni, Fe, P, and B, and impurity elements of Si and C,
- the Li-based oxide sputtering target is bonded to the backing plate through the bonding material, and
- the Li-based oxide sputtering target has a bending strength of 20 MPa or larger.
4 more elements
Dependencies are inferred from the claim text.