Methods and systems for managing semiconductor manufacturing equipment
AssigneeSamsung Electronics Co., Ltd.
InventorsKye Hyun Baek, Ohyung Kwon, Junghyun Cho, Haejoong Park
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Abstract
Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the parts.
Claims15
A method of managing semiconductor manufacturing equipment including a controller, the method comprising:
- instructing a preventive maintenance by the controller on the semiconductor manufacturing equipment, the preventive maintenance comprising disassembling, cleaning, and reassembling a plurality of parts associated with a chamber;
- checking whether the plurality of parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the plurality of parts by the controller;
- and
- inducing a plasma reaction in the chamber by the controller using a high-frequency power generated by a generator, the high-frequency power different from the high-frequency voltage,
- wherein checking whether the plurality of parts are correctly assembled comprises:
- applying first and second input high-frequency voltages of the high-frequency voltage via a high-frequency voltage meter connected in series to the plurality of parts;
- and
- obtaining first and second output high-frequency voltages responded to the first and second input high-frequency voltages from the plurality of parts.
A system for managing semiconductor manufacturing equipment, in which a chamber, including a plurality of parts, is provided, the system comprising:
- a generator generating a high-frequency power to induce plasma reaction in the chamber;
- a high-frequency voltage meter connected in series to the plurality of parts and configured to apply an input high-frequency voltage to the plurality of parts and measure an output high-frequency voltage from the plurality of parts, the input high-frequency voltage different form the high-frequency power;
- and
- a control unit configured to obtain reflectance and absorptivity from the input and output high-frequency voltages and to determine whether the plurality of parts are correctly assembled using the reflectance and the absorptivity.
Dependencies are inferred from the claim text.