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US 9,869,929 B2Granted
Resin, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro Masuyama, Yuki Suzuki, Koji Ichikawa
Life of this patent
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Abstract
A resist composition include (A1) a resin which includes a structural unit represented by formula (a4), and which resin has neither an acid-labile group nor an aromatic ring, (A2) a resin having an acid-labile group, and an acid generator, wherein R3 represents a hydrogen atom or a methyl group, R4 represents a C1 to C24 saturated hydrocarbon group having a fluorine atom, and a methylene group contained in the saturated hydrocarbon group may be replaced by an oxygen atom or a carbonyl group; and a structural unit having a ketone group.
Claims11
A resist composition comprising
- (A1) a resin which comprises
- a structural unit represented by formula (a4):
- wherein R3 represents a hydrogen atom or a methyl group,
- R4 represents a C1 to C24 saturated hydrocarbon group having a fluorine atom, and a methylene group contained in the saturated hydrocarbon group may be replaced by an oxygen atom or a carbonyl group;
- and
- a structural unit represented by formula (a6), and
- the resin has neither an acid-labile group nor an aromatic ring,
- (A2) a resin having an acid-labile group, and
- an acid generator:
- wherein R5 represents a hydrogen atom or a methyl group, and
- R6 represents a C1 to C8 aliphatic hydrocarbon group or a C3 to C18 alicyclic hydrocarbon group, and a methylene group contained in the aliphatic hydrocarbon group or the alicyclic hydrocarbon group may be replaced by an oxygen atom or a carbonyl group, provided that at least one of the methylene groups has been replaced by a carbonyl group, and none of the carbonyl group(s) replacing methylene group(s) is adjacent to an oxygen atom replacing a methylene group or the oxygen atom attached to R6,
- wherein the resin (A1) further comprises a structural unit represented by formula (I) which is different from the structural unit represented by formula (a6):
- wherein R1 represents a hydrogen atom or a methyl group,
- L1 represents a single bond or a C1 to C18 divalent saturated hydrocarbon group where a methylene group may be replaced by an oxygen atom or a carbonyl group, and
- R2 represents a C3 to C18 alicyclic hydrocarbon group where a hydrogen atom may be replaced by a C1 to C8 aliphatic hydrocarbon group or a hydroxy group, provided that the carbon atom directly bonded to L1 has no aliphatic hydrocarbon group by which a hydrogen atom has been replaced.
12 more elements
A resin comprising
- a structural unit represented by formula (a4):
- wherein R3 represents a hydrogen atom or a methyl group,
- R4 represents a C1 to C24 saturated hydrocarbon group having a fluorine atom, and a methylene group contained in the saturated hydrocarbon group may be replaced by an oxygen atom or a carbonyl group;
- and
- a structural unit represented by formula (a6),
- the resin having neither an acid-labile group nor an aromatic ring:
- wherein R5 represents a hydrogen atom or a methyl group, and
- R6 represents a C1 to C8 aliphatic hydrocarbon group or a C3 to C18 alicyclic hydrocarbon group, and a methylene group contained in the aliphatic hydrocarbon group or the alicyclic hydrocarbon group may be replaced by an oxygen atom or a carbonyl group, provided that at least one of the methylene groups has been replaced by a carbonyl group, and none of the carbonyl group(s) replacing methylene group(s) is adjacent to an oxygen atom replacing a methylene group or the oxygen atom attached to R6,
- wherein the resin (A1) further comprises a structural unit represented by formula (I) which is different from the structural unit represented by formula (a6):
- wherein R1 represents a hydrogen atom or a methyl group,
- L1 represents a single bond or a C1 to C18 divalent saturated hydrocarbon group where a methylene group may be replaced by an oxygen atom or a carbonyl group, and
- R2 represents a C3 to C18 alicyclic hydrocarbon group where a hydrogen atom may be replaced by a C1 to C8 aliphatic hydrocarbon group or a hydroxy group, provided that the carbon atom directly bonded to L1 has no aliphatic hydrocarbon group by which a hydrogen atom has been replaced.
9 more elements
Dependencies are inferred from the claim text.