Atomic-force microscope system with integrated fabry-perot resonator

An atomic-force microscope system, comprising:

• an electrically conducting cantilever support;
• an electrically insulating element;
• an electrically conducting cantilever anchored at a first end to the cantilever support via the insulating element,
• wherein:
• the cantilever comprises a probe tip at a second end thereof;
• and
• the cantilever support is configured as a backside electrode of the cantilever for backside actuation thereof,
• and wherein the system further comprises:
• a Fabry-Perot interferometer, comprising:
• a resonator with:
• a first mirror, defined on the cantilever;
• and
• a second mirror, defined on the cantilever support, having a first side and a second side configured to allow light injection, opposite to said first side, the latter extending at least partly vis-à-vis the first mirror;
• a light-emitting device, configured to emit light toward said second side;
• and
• a detector, configured for detecting a property of the system impacted by interferences of light emitted by the light-emitting device that is confined between the first mirror and the second mirror, the interferences depending on a deflection of the cantilever, in operation.