Pressure sensor
AssigneeSiemens Aktiengesellschaft
InventorKjetil Haldorsen
Life of this patent
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Abstract
A pressure sensor is provided. The pressure sensor has a differential pressure sensor adapted to measure differential pressure between two differential pressure sensor inputs in a first differential pressure range. The pressure sensor further includes a first absolute pressure sensor and a second absolute pressure sensor adapted to measure an absolute pressure in an absolute pressure range. The pressured sensor is further provided with a measuring unit configured to determine a differential pressure in a second differential pressure range on the basis of absolute pressure measurements taken by the first and second absolute pressure sensors.
Claims21
A pressure sensor, comprising:
- a differential pressure sensor adapted to measure differential pressure between two differential pressure sensor inputs in a first differential pressure range;
- a first absolute pressure sensor and a second absolute pressure sensor adapted to measure an absolute pressure in an absolute pressure range;
- and
- a measuring unit configured to determine a differential pressure in a second differential pressure range on the basis of absolute pressure measurements taken by the first and second absolute pressure sensors, wherein the first and second absolute pressure sensors are configured to have an absolute pressure range such that the second differential pressure range extends to relatively higher pressures than the first differential pressure range, wherein the differential pressure sensor comprises a differential pressure sensor element and a protection mechanism configured such that a differential pressure above the first pressure range is not transmitted to the sensor element.
A method of measuring differential pressure, comprising:
- measuring, in a first range of differential pressure, differential pressure via a differential pressure sensor;
- and
- determining, in a second range of differential pressure higher than the first range, differential pressure on the basis of absolute pressure measurements taken by a first absolute pressure sensor and a second absolute pressure sensor, wherein the differential pressure sensor comprises a differential pressure sensor element and a protection mechanism configured such that a differential pressure above the first pressure range is not transmitted to the sensor element.
A pressure sensor, comprising:
- a differential pressure sensor adapted to measure differential pressure between two differential pressure sensor inputs in a first differential pressure range;
- a first absolute pressure sensor and a second absolute pressure sensor adapted to measure an absolute pressure in an absolute pressure range;
- a measuring unit configured to determine a differential pressure in a second differential pressure range on the basis of absolute pressure measurements taken by the first and second absolute pressure sensors;
- and
- a calibration unit configured to calibrate the determination of the differential pressure by the measuring unit, the calibration being based on a differential pressure measurement taken by the differential pressure sensor, wherein the first and second absolute pressure sensors are configured to have an absolute pressure range such that the second differential pressure range extends to relatively higher pressures than the first differential pressure range.
A method of measuring differential pressure, comprising:
- measuring, in a first range of differential pressure, differential pressure via a differential pressure sensor;
- determining, in a second range of differential pressure higher than the first range, differential pressure on the basis of absolute pressure measurements taken by a first absolute pressure sensor and a second absolute pressure sensor;
- taking a differential pressure measurement in the first range via the differential pressure sensor;
- and
- calibrating said determination of differential pressure in the second range using said differential pressure measurement taken in the first range.
Dependencies are inferred from the claim text.