US 9,869,540 B1Granted

Displacement measuring system and machining system comprising the same

AssigneeNoporvis Co., Ltd.

InventorsWei-Hung Su, Hui-Hung Lin, Kuo-Kai Hung, Chun-Neng Chan, Lu-Yu Wang

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Abstract

A displacement measuring device includes an optical module for refracting or reflecting light; a beam splitting module including a polarizing beam splitting layer for allowing light with a first polarization direction to pass through and reflecting light with a second polarization direction; a light source for generating a first light beam with the first polarization direction and a second light beam with the second polarization direction, wherein the first light beam is reflected by a measured object after passing through the optical module and the beam splitting module, and the second light beam is reflected by the polarizing beam splitting layer after passing through the optical module; an image sensor for sensing an interference pattern generated by the reflected first and second light beams; and a processing unit for calculating a displacement value of the measured object according to the interference pattern.

Claims17

Dependent claims

A displacement measuring device, comprising:

a first optical module configured to refract or reflect light;
a first beam splitting module, comprising:
a first transparent plate having a first surface and a second surface, the first surface being configured to be arranged between the second surface and a first measuring surface of a measured object;
a first polarizing beam splitting layer formed on the first surface for allowing light with a first polarization direction to pass through and reflecting light with a second polarization direction;
and
a first reflective layer partially formed on the second surface for reflecting light;
a light source configured to generate a first light beam with the first polarization direction and a second light beam with the second polarization direction, wherein after sequentially passing through a first side of the first optical module, the first transparent plate and the first polarizing beam splitting layer, the first light beam is reflected by the first measuring surface of the measured object in order to further sequentially pass through the first polarizing beam splitting layer, the first transparent plate and a second side of the first optical module;
and after passing through the first side of the first optical module, the second light beam enters the first transparent plate and is sequentially reflected by the first polarizing beam splitting layer, the first reflective layer and the first polarizing beam splitting layer in order to further pass through the second side of the first optical module;
an image sensor configured to sense a first interference pattern generated by the first and second light beams passing through the second side of the first optical module;
and
a processing unit electrically connected to the image sensor for calculating a displacement value of the measured object relative to the displacement measuring device along a first predetermined direction according to the first interference pattern.

8 more elements

A machining system, comprising:

a base;
a cutting tool arranged on the base for machining a workpiece;
a holding platform movable relative to the base for holding the workpiece;
and
a displacement measuring device arranged on the holding platform, the displacement measuring device comprising:
a first optical module configured to refract or reflect light;
a first beam splitting module, comprising:
a first transparent plate having a first surface and a second surface, the first surface being configured to be arranged between the second surface and a first measuring surface of the base;
a first polarizing beam splitting layer formed on the first surface for allowing light with a first polarization direction to pass through and reflecting light with a second polarization direction;
and
a first reflective layer partially formed on the second surface for reflecting light;
a light source configured to generate a first light beam with the first polarization direction and a second light beam with the second polarization direction, wherein after sequentially passing through a first side of the first optical module, the first transparent plate and the first polarizing beam splitting layer, the first light beam is reflected by the first measuring surface of the base in order to further sequentially pass through the first polarizing beam splitting layer, the first transparent plate and a second side of the first optical module;
and after passing through the first side of the first optical module, the second light beam enters the first transparent plate and is sequentially reflected by the first polarizing beam splitting layer, the first reflective layer and the first polarizing beam splitting layer in order to further pass through the second side of the first optical module;
an image sensor configured to sense a first interference pattern generated by the first and second light beams passing through the second side of the first optical module;
and
a processing unit electrically connected to the image sensor for calculating a displacement value of the holding platform relative to the base along a first predetermined direction according to the first interference pattern.

13 more elements

Dependencies are inferred from the claim text.