Fluid control apparatus

A fluid control apparatus comprising:

• a plurality of fluid control devices arranged in series;
• a plurality of passage blocks that are arranged below the plurality of fluid control devices and support the plurality of fluid control devices;
• heaters, covering both sides of some of the plurality of fluid control devices and the plurality of passage blocks;
• and
• a pipe extending below the plurality of passage blocks;
• the fluid control apparatus further comprising:
• a plate-shaped support member to which the plurality of passage blocks are detachably mounted;
• a hollow metal mounting member having an upper surface to which the support member is secured, the mounting member being detachably mounted to a base member;
• and
• a pipe heating member composed of a bottom wall and a pair of side walls, the pipe heating member accommodating the pipe between the pair of side walls and being fitted into the mounting member, wherein the heaters abut an outside surface of the mounting member and an outside surface of each side wall of the pipe heating member abuts an inside surface of the mounting member.