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US 9,869,033 B2Granted
Production of a GaN bulk crystal substrate and a semiconductor device formed on a GaN bulk crystal substrate
AssigneeRicoh Company, Ltd.
InventorsSeiji Sarayama, Masahiko Shimada, Hisanori Yamane, Hirokazu Iwata
Life of this patent
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Abstract
A crystal has a diameter of 1 cm or more and shows a strongest peak in cathode luminescent spectrum at a wavelength of 360 nm in correspondence to a band edge.
Claims4
A method of producing a group III nitride crystal in a reaction vessel pressurized to a higher pressure than that of a surrounding, said method comprising the steps of:
- forming a mixed melt comprising a group III metal element and an alkali metal element in the reaction vessel;
- disposing a seed crystal in the reaction vessel;
- supplying a nitrogen source of nitrogen or a compound containing nitrogen to the reaction vessel, the nitrogen source causing a reaction with the mixed melt and forming the group III nitride crystal;
- and
- growing the group III nitride crystal on an outer side of the seed crystal.
2 more elements
Dependencies are inferred from the claim text.